HYT PM-250 Series

Vacuum Particle Controller

Interface between any HYT in situ vacuum particle sensor and data acquisition systems. 256-point data buffer. Mount to any surface. The PM-250E supports RS232, RS422, and RS485 and an optional fiber optic connector. PM-250E supports one HYT sensor.

  • Interface between sensors and data acquisition systems
  • Support real-time particle monitoring tasks
  • Machine Trigger capability synchronizes particle data collection with semiconductor production process cycle
Product Information
pdf HYT PM250 Datasheet
pdf HYT PM250 Operator Manual
pdf Reduction in Yield Impact of particle Inducted structural defects at Batch Ion Implant White Paper
pdf Reducing Yield Impact at Ion Implant Process White Paper
 
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